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Title: Automated Measuremeut Apparatus Used In Integrated Circuit Processiyg
Author: Ulrich Kaempf
Source: 1979 Measurement Science Conference
Year Published: 1979
Abstract: The advances in the miniaturization of integrated circuits bring with them an ever increasing demand on the quality of materials, process and packaging technologies. In order to take imdiate corrective action and to eliminate defective parts from further unnecessary process steps, automated testing is now commonly being performed at every process level.

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